Process Diagnostics
Analytical Tools
OPIC maintains the following process diagnostics equipment:
- Atomic Force Microscope - Veeco Innova SPM
- Simultaneous TGA/DSC with in line Mass Spec
- FTIR
- PV Test Stand
- Real Time Quantum Efficiency Tester
- ICP
- Variable Angle Spectroscopic Ellipsometer (VASE) - J.A. Woollam Co., Inc.
To use the VASE or for additional information please contact:
Dr. Brady J. Gibbons, Assistant Professor
Department of Mechanical, Industrial, and Manufacturing Engineering
Tel: (541) 737-2427
Fax: (541) 737-2600
Email: brady.gibbons@oregonstate.edu
http://mime.oregonstate.edu/research/gibbons/

Image courtesy of Veeco, for more information check out the Veeco website.
-Contact Mode
-Tapping ModeTM
-Conductive AFM
-Electric Field Microscopy
-Nanolithography

-TA Q600 DSC/TGA
-Max temperature 1500 deg. C
-In-line advanced real-time gas analyzer, Hiden HPR-20

-Nicolet 6700 FTIR Spectrometer
-In-situ FTIR Transmission and ATR
-Smart iTR attachment for fast and easy analysis of solids and liquids

-Six inch square AM 1.5 illuminated area
-IV curve tracing

-FlashQE from Tau Science
-Photon to electron efficiency vs. wavelength
-Studies surface passivation, carrier lifetime, bulk diffusion length
-Spectrum collection in less than 2 seconds allows spacial mapping of QE
-Time-resolved data for degredation studies

-AtomScan 16

J.A. Woollam Co., Inc. VASE, High Speed Monochromator System HS-190 & VASE Module Control VB-400
-Wavelength: 193~2500nm
-Reflection and Transmission Ellipsometry
-Generalized Ellipsometry
-Reflectance (R) intensity
-Transmittance (T) intensity
-Cross-polarized R/T
-Depolarization
-Scatterometry
-Mueller-matrix