Process Diagnostics

Analytical Tools

OPIC maintains the following process diagnostics equipment:

• Atomic Force Microscope - Veeco Innova SPM

Image courtesy of Veeco, for more information check out the Veeco website.


-Contact Mode


-Tapping Mode^TM


-Conductive AFM


-Electric Field Microscopy


-Nanolithography




• Simultaneous TGA/DSC with in line Mass Spec




-TA Q600 DSC/TGA


-Max temperature 1500 deg. C


-In-line advanced real-time gas analyzer, Hiden HPR-20




• FTIR




-Nicolet 6700 FTIR Spectrometer


-In-situ FTIR Transmission and ATR


-Smart iTR attachment for fast and easy analysis of solids and liquids




• PV Test Stand




-Six inch square AM 1.5 illuminated area


-IV curve tracing




• Real Time Quantum Efficiency Tester




-FlashQE from Tau Science


-Photon to electron efficiency vs. wavelength


-Studies surface passivation, carrier lifetime, bulk diffusion length


-Spectrum collection in less than 2 seconds allows spacial mapping of QE


-Time-resolved data for degredation studies




• ICP




-AtomScan 16



• Variable Angle Spectroscopic Ellipsometer (VASE) - J.A. Woollam Co., Inc.
  
  

  To use the VASE or for additional information please contact:
  Dr. Brady J. Gibbons, Assistant Professor
  Department of Mechanical, Industrial, and Manufacturing Engineering
  Tel: (541) 737-2427
  Fax: (541) 737-2600
  Email: brady.gibbons@oregonstate.edu
  http://mime.oregonstate.edu/research/gibbons/


J.A. Woollam Co., Inc. VASE, High Speed Monochromator System HS-190 & VASE Module Control VB-400



-Wavelength: 193~2500nm


-Reflection and Transmission Ellipsometry


-Generalized Ellipsometry


-Reflectance (R) intensity


-Transmittance (T) intensity


-Cross-polarized R/T


-Depolarization


-Scatterometry


-Mueller-matrix